Degree Level
Semiconductor Devices and VLSI Technology
Develop an undergraduate level understanding of semiconductor physics, and use this to study the operation of basic two-terminal and three-terminal semiconductor devices. The students will also be introduced to the unit processes involved in microfabrication and the process integration needed for high volume IC manufacturing.
Course ID: EE3106
Course Credits: 4
Course Type: Degree
Pre-requisites: None
Course structure & AssessmentsVIEW COURSE VIDEOS
For details of standard course structure and assessments, visit Academics page.
| Module 1 | History and relevance of semiconductor devices in modern world; Solids, Crystals and Electronic grade materials; Formation of energy bands in solids; Concept of hole, Density of states and Fermi level. Intrinsic and extrinsic semiconductors; Equilibrium Carrier concentration; Direct and indirect semiconductors; Recombination and Generation of carriers; Carrier transport – Drift and Diffusion; Equations of state – Continuity and Poisson equation |
| Module 2 | PN junction – energy band diagram, characteristics and modeling; LEDs, Solar cells, Metal Semiconductor contacts. |
| Module 3 | MOS capacitor; MOSFET – energy band diagram, characteristics and modeling; CMOS inverter, Scaled MOSFETs. Bipolar junction transistors – physics and characteristics; |
| Module 4 | Overview of Semiconductor manufacturing; Silicon wafer production; Unit processes – Oxidation, Diffusion, Ion-implantation, Lithography, Deposition, Etching; Fabrication process flow of PN junction diode and MOSFET |
Prescribed Books
The following are the suggested books for the course:
Donald A. Neamen, “Semiconductor Physics and Devices- Basic Principles,” McGraw Hill, 2021
Robert Pierret, “Semiconductor Device Fundamentals,” Pearson Education, 2006
James D. Plummer and Peter B. Griffin, “Integrated Circuit Fabrication: Science and Technology,” Cambridge University Press, 2023
Hong Xiao, “Introduction to Semiconductor Manufacturing Technology,” SPIE press, 2012.
Jesús A. del Alamo, “Integrated Microelectronic Devices: Physics and Modeling,” Pearson, 2017
Robert Doering & Yoshio Nishi, "Handbook of Semiconductor Manufacturing Technology," CRC press, 2007
Amitava DasGupta and Nandita DasGupta, “Semiconductor Devices: Modelling and Technology”, Prentice Hall India, 2004
S. Karmalkar, “Solid State Devices”, NPTEL video lectures
Nandita DasGupta, “VLSI Technology” NPTEL video lectures
About the Instructors
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